Laurent Pain, Lithography Laboratory Manager, CEA/Leti

Graduated from Ecole Nationale Supérieure de Physique de Grenoble in 1992. After receiving his diploma, he received his PhD from CNET France Telecom on DUV resists study. He joined CEA-LETI in 1996 to work on infrared technology, then switched to the Microelectronics Department in 1999 to work on 193-nm and e-beam resist technology. In 2000, he jointed the Crolles site to participate in the development of the first 193-nm lithography cell. From 2001 to end 2007, he leaded at ST Crolles the e-beam direct-write lithography cell project. The objective of this activity is to realize, for example, early device architecture validation, prototyping, and customization. Since 2008, he is responsible at CEA-LETI of the lithography laboratory.

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