Video: Photomask Japan – eBeam Initiative Update [April 24, 2023]
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Tributes: Dr. Hans Pfeiffer, Industry and eBeam Luminary
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Video: Spring 2023 Fine Line Video Journal [March 28, 2023]
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Presentation: eBeam Lithography Misperceptions and Opportunities by David K. Lam, Multibeam Corporation, eBeam Initiative lunch [February 28, 2023]
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Presentation: eBeam Inspection and Metrology: Developments and Applications in Lithography by Yu Cao, ASML, eBeam Initiative lunch [February 28, 2023]
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Press:
EUV TECH and IBM Join the eBeam Initiative [February 28, 2023]
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Japanese,
Simplified Chinese &
Traditional Chinese
Survey: 2023 Deep Learning Applications List by eBeam Initiative members [February 28, 2023]
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Videos: Winter 2023 Fine Line Video Journal [January 10, 2023]
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Mission | The Initiative provides a forum for educational and promotional activities regarding new design-to-manufacturing approaches that help reduce mask costs for semiconductor devices based on electron beam (eBeam) technologies.
Design Team Advisors | Provide business and technical insights and requirements to the Steering Group and Ecosystem members.
eBeam Member Videos | Proof points, viewpoints and products discussed by eBeam Initiative members.
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Semiconductor Engineering: Reflections on PMJ 2023: Embracing the Era of Curvilinear Masks by Seiji Nagahara of TEL [May 18, 2023]
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Semiconductor Engineering: How Curvilinear Mask Writing Affects Chip Design - Video [April 12, 2023]
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Semiconductor Engineering: Evolution of the EUV Ecosystem Reflected at 2023 Advanced Lithography Patterning [March 16, 2023]
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Semiconductor Digest: EUV Tech and IBM Join the eBeam Initiative [March 1, 2023]
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Semiconductor Engineering: Mapping the Future of Lithography [February 16, 2023]
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BACUS News: Editorial – Thomas Scherübl, Carl Zeiss SMT GmbH, on best mask size for High-NA EUV; Featured Article – 2022 BACUS Best Paper by D2S [January 7, 2023]
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SPIE: BACUS December webinar now online (login required) – “Carbon Nanotube Pellicles for EUV Lithography: Form, Function, and Progress” presented by Emily Gallagher of imec [January 7, 2023]
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