Presentations and Papers:

• Survey: 2025 eBeam Initiative Luminaries Survey Results [September 23, 2025]
  View
  
  

• Presentation: Technology Analysis of Leading-Edge Semiconductor Manufacturing, Tetsuya Wadaki, Morgan Stanley MUFG [September 23, 2025]
  View
  
  

• Presentation: Full-Reticle Curvilinear Inline Linearity Correction Including Variable Bias with Zero Turnaround Time by Paris Spinelli, Micron, at PMJ 2025 [April 18, 2025]
  View
  
  

• Presentation: Three Ways to Improve Wafer Uniformity by Aki Fujimura, D2S at PMJ 2025 [April 18, 2025]
  View
  
  

• Presentation: PLDC Improves Uniformity and Linearity for All Masks by Aki Fujimura, D2S [February 25, 2025]
  View
  
  

• Survey: 2025 Deep Learning Applications List by eBeam Initiative members [February 18, 2025]
  View
  
  

• Survey: 2024 eBeam Initiative Luminaries Survey Results [October 1, 2024]
  View
  
  

• Presentation: Lithography Technologies to Support High Performance Computing and Advancing AI by Toshiyuki Hisamura, Principal Member of Technical Staff for Silicon Technology at AMD [July 15, 2024]
  View
  
  

• Presentation: We’ve Come A Long Way in 15 Years by Aki Fujimura, CEO of D2S and co-founder of the eBeam Initiative [February 27, 2024]
  View
  
  

• Presentation: Cell Projection to Extend Shaped-Beam-Litho for New Applications by Matthias Slodowski, Vistec Electron Beam [February 27, 2024]]
  View
  
  

• Survey: 2024 Deep Learning Applications List by eBeam Initiative members [February 27, 2024]
  View
  
  

• Survey: 2023 eBeam Initiative Luminaries Survey Results [October 3, 2023]
  View
  
  

• Presentation: Economics of Mask by Glen Scheid, Micron [October 3, 2023]
  View
  
  

• Presentation: DAC 2023 - Why is Curvy Design an Opportunity Now? Panel Slides [July 11, 2023]
  View
  
  

• Presentation: eBeam Lithography Misperceptions and Opportunities by David K. Lam, Multibeam Corporation, eBeam Initiative lunch [February 28, 2023]
  View
  
  

• Presentation: eBeam Inspection and Metrology: Developments and Applications in Lithography by Yu Cao, ASML, eBeam Initiative lunch [February 28, 2023]
  View
  
  

• Survey: 2023 Deep Learning Applications List by eBeam Initiative members [February 28, 2023]
  View
  
  

• Presentation: O(p): GPUs, Pixels, DL, Curvy Masks by Aki Fujimura, D2S, eBeam Initiative Reception [September 27, 2022]
  View
  
  

• Presentation: Curvilinear Masks in Memory for DUV and EUV by Ezequiel Russell, Micron, eBeam Initiative Reception [September 27, 2022]
  View
  
  

• Presentation: Curvilinear MPC in Zero Time by Noriaki Nakayamada, NuFlare, eBeam Initiative Reception [September 27, 2022]
  View
  
  

• Survey: 2022 eBeam Initiative Luminaries Survey Results [September 27, 2022]
  View
  
  

• Survey: 2022 Deep Learning Applications List by eBeam Initiative members [March 1, 2022]
  View
  
  

• Survey: 2021 eBeam Initiative Luminaries Survey Results [September 28, 2021]
  View
  
  

• Paper: Inverse lithography technology: 30 years from concept to practical, full-chip reality by Leo Pang, D2S [August 31, 2021]
  View
  
  

• Survey: 2021 Deep Learning Applications List by eBeam Initiative members [February 22, 2021]
  View
  
  

• Survey: 2020 eBeam Initiative Mask Makers' Survey Results [September 22, 2020]
  View
  
  

• Survey: eBeam Initiative Luminaries (formerly Perceptions) Survey Results [September 22, 2020]
  View
  
  

• Presentation: ILT and Curvilinear Mask Designs for Advanced Memory Designs by Ezequiel Russell, Micron, at SPIE eBeam lunch [February 25, 2020]
  View
  
  

• Presentation: The Mycronic Path Back to Semiconductors and into Deep Learning, Mycronic, at SPIE eBeam lunch [February 25, 2020]
  View
  
  

• Survey: 2019 eBeam Initiative Perceptions Survey Results [September 17, 2019]
  Download PDF
  
  

• Presentation: Digital Twins for a Curvilinear World by Leo Pang, D2S, at the eBeam Initiative Reception [September 17, 2019]
  View
  
  

• Survey: 2019 eBeam Initiative Mask Makers' Survey Results [September 16, 2019]
  Download PDF
  
  

• Presentation: The need for speed: Computations for EUV Lithography by Harry Levinson, HJL Lithography, at SPIE eBeam lunch [February 26, 2019]
  Download PDF
  
  

• Presentation: How GPU-Accelerated Simulation Enables Applied Deep Learning for Photomasks by Leo Pang, D2S, at SPIE eBeam lunch [February 26, 2019]
  Download PDF
  
  

• Presentation: Applications of Machine Learning in Computational Lithography by Yu Cao, ASML, at SPIE eBeam lunch [February 26. 2019]
  Download PDF
  
  

• Survey: 2018 eBeam Initiative Mask Maker Survey Results [September 18, 2018]
  Download PDF
  
  

• Survey: 2018 eBeam Initiative Perceptions Survey Results [September 18, 2018]
  Download PDF
  
  

• Presentation: Renew, Retire, Replace by Franklin Kalk, Toppan Photomasks, at BACUS eBeam Reception [September 18, 2018]
  Download PDF
  
  

• Presentation: Multi-beam mask writer MBM-1000 for advanced mask making presented by Hiroshi Matsumoto, NuFlare Technology, at SPIE eBeam lunch [February 27, 2018]
  Download PDF
  
  

• Presentation: Frontiers in CD-SEM metrology presented by Sergey Babin, aBeam Technologies, at SPIE eBeam lunch [February 27, 2018]
  Download PDF
  
  

• Presentation: Mask patterning challenges for EUV N7 and beyond presented by Mike Green, Photronics, at SPIE eBeam lunch [February 27, 2018]
  Download PDF
  
  

• Survey: 2017 eBeam Initiative Mask Maker Survey Results [September 11, 2017]
  Download PDF
  
  

• Survey: eBeam Initiative Perceptions Survey Results [September 11, 2017]
  Download PDF
  
  

• Presentation: What’s Different about EUV Masks? by Tom Faure from GLOBALFOUNDRIES, presented at eBeam Initiative “BACUS” Reception [September 11, 2017]
  Download PDF
  
  

• Presentation: The Resurgence of ILT by Tom Cecil, Synopsys, presented at eBeam Initiative SPIE 2017 Lunch [February 28, 2017]
  Download PDF
  
  

• Presentation: Mask Modeling in the Multi-beam Era by Ryan Pearman, D2S, presented at eBeam Initiative SPIE 2017 Lunch [February 28, 2017]
  Download PDF
  
  

• Presentation: eBeam at Light Speed for the EPE Metrology Era by Ofer Adan, Applied Materials, presented at eBeam Initiative SPIE 2017 Lunch [February 28, 2017]
  Download PDF
  
  

• Survey: 2016 eBeam Initiative Mask Maker Survey Results [September 12, 2016]
  Download PDF
  
  

• Survey: 2016 eBeam Initiative Perceptions Survey Results [September 12, 2016]
  Download PDF
  
  

• White paper: GPU-Accelerated Computing: Maximizing Performance for the 24/7 Semiconductor Manufacturing Environment by Aki Fujimura, D2S [September 12, 2016]
  Download PDF
  
  

• Presentation: Embedding IoT Chip Security using eBeam Solutions by Dr. David Lam, Multibeam Corporation [September 12, 2016]
  Download PDF
  
  

• Introduction and Recent Results of Multi-beam Mask Writer MBM-1000 by Hiroshi Matsumoto, NuFlare at Taiwan Seminar on June 22, 2016
  Download PDF
  
  

• Maglen eBeam Wafer Imaging System by Tony Luo, Maglen at Taiwan Seminar on June 22, 2016
  Download PDF
  
  

• The Latest Progress in Model-based Mask Data Prep by Leo Pang, D2S at Taiwan Seminar on June 22, 2016
  Download PDF
  
  

• The Latest Progress in Model-Based Mask Data Preparation by Leo Pang, D2S at CSTIC on March 13, 2016
  Download PDF
  
  

• Introduction and Recent Results of Multi-beam Mask Writer MBM-1000 by Hiroshi Matsumoto, NuFlare at SPIE on February 23, 2016
  Download PDF
  
  

• 5nm Test Chip Design & Manufacturing Challenges by Praveen Raghavan, imec at SPIE on February 23, 2016
  Download PDF
  
  

• The Challenges in Making NIL Master Templates by Naoya Hayashi, DNP at SPIE on February 23, 2016
  Download PDF
  
  

• Recent Progress of Electron Multi-Beam Mask Writer by Elmar Platzgummer, IMS at BACUS on September 29, 2015
  Download PDF
  
  

• Mask Metrology in the ILT World by Leo Pang, D2S at BACUS on September 29, 2015
  Download PDF
  
  

• 2015 eBeam Initiative Perceptions Survey and Mask Makers Survey, September 29, 2015
  Download PDF
  
  

• Presentation: Conquering Heat Issues in Electron Beam Lithography – Past, Present and the Future by Noriaki Nakayamada of NuFlare Technology at PMJ Workshop [April 20, 2015]
  Download PDF
  
  

• Presentation: Electron Beam-based Photomask Repair by Markus Waiblinger of Carl Zeiss, at PMJ Workshop on [April 20, 2015]
  Download PDF
  
  

• Presentation: Simulation-based Mask Inspection and Review for the 10nm Node and Beyond by Leo Pang of D2S, at PMJ Workshop on [April 20, 2015]
  Download PDF
  
  

• Presentation: Reactivating the Density Benefits of Moore’s Law - the eBeam Community Gears Up by Aki Fujimura, D2S [February 24, 2015]
  Download PDF
  
  

• Presentation: Wafer Plane Analysis of Mask SEM in 2D & 3D by Takayuki Nakamura, Advantest [February 24, 2015]
  Download PDF
  
  

• Presentation: Mask Maker’s Perspective on 10-nm Node by Chris Progler, Photronics [February 24, 2015]
  Download PDF
  
  

• Paper: Fabrication of patterns with linewidths down to 1.5 nm by Dr. Sergey Babin – aBeam Technologies, Dr. Valeriy Yashchuk - LBNL, Dr. Ray Conley – Argonne National Laboratory [February 3, 2015]
  Download PDF
  
  

• Survey: 2014 eBeam Initiative survey results [September 16, 2014]
  Download PDF
  
  

• Presentation: Integrated Mask/Litho Signoff Verification using a Virtual VSB Writer by Bob Pack, GLOBALFOUNDRIES [September 16, 2014]
  Download PDF
  
  

• Presentation: Impact of Context-Dependent Mask-Effects on Mask Hotspots by Aki Fujimura, D2S [September 16, 2014]
  Download PDF
  
  

• White Paper: Mask Hotspots Are Escaping the Mask Shop; Model-Based Mask Verification Can Stop Them, [February 25, 2014]
  Download PDF
  
  

• 2014 SPIE eBeam Initiative lunch presentations by D2S, DNP and Mentor Graphics, [February 25, 2014]
  Download PDF
  
  

• BACUS 2013 eBeam Initiative event presentation by Dr. John Chen, NVIDIA [September 10, 2013]
  Download PDF
  
  

• BACUS 2013 eBeam Initiative event presentation by Dr. Kokoro Kato, Hitachi High-Tech Science Corp [September 10, 2013]
  Download PDF
  
  

• eBeam Initiative 2013 survey results [September 10, 2013]
  Download PDF
  
  

• Survey Results presented during Photomask Japan 2013 panel - Future Mask Patterning Technologies in the Next Decade
  Download PDF
  
  

• Photomask Japan 2013 panel presentation on challenges for future eBeam mask writers by Dr. Hiroshi Matsumoto, NuFlare.
  Download PDF
  
  

• Photomask Japan 2013 panel presentation on multi-beam by Dr. Hans Loeschner, IMS Nanofabrication
  Download PDF
  
  

• Photomask Japan 2013 panel presentation on eBeam simulation by Aki Fujimura, D2S
  Download PDF
  
  

• SPIE 2013 eBeam Initiative lunch presentations by D2S, Xilinx and Toshiba [February 26, 2013]
  Download PDF
  
  

• eBeam Initiative 2012 survey results, Jan Willis, eBeam Initiative [September 11, 2012]
  Download PDF
  
  

• Printing results from a multi-beam mask exposure tool Elmar Platzgummer, IMS Nanofabrication [September 11, 2012]
  Download PDF
  
  

• Improving mask CDU using MB-MDP at 14nm and beyond, Byung-Gook Kim, Samsung [September 11, 2012]
  Download PDF
  
  

• Full-Chip MB-MDP is here, Aki Fujimura, D2S [September 11, 2012]
  Download PDF
  
  

• HOYA, GLOBALFOUNDRIES and D2S presentations at eBeam Initiative Luncheon during PMJ2012 [April 19, 2012]
  Download PDF
  
  

• PMJ 2012 Results of Proof-of-Concept 50keV electron multi-beam Mask Exposure Tool (eMET POC) by Elmar Platzgummer, Christof Klein, and Hans Loeschner, IMS Nanofabrication [April 2012]
  Download PDF
  
  

• Computational Lithography Requirements & Challenges for Mask Making by Naoya Hayashi, DNP Printing Co., Ltd, presented at the LithoVision technical symposium [February 2012]
  Download PDF
  
  

• eBeam Initiative SPIE 2012 presentations by D2S, Tela Innovations in collaboration with CEA-Leti [February 14, 2012]
  Download PDF
  
  

• MB-MDP Enables Circular Shots to Improve Mask Accuracy as Well as Shot Count by Ryan Pearman and Robert Pack - D2S, Inc. [February 13, 2012]
  Download PDF
  
  

• SPIE 2012 50keV electron multibeam mask writer for the 11nm HP node: first results of the proof of concept tool (eMET POC), Christof Klein, Hans Loeschner, Elmar Platzgummer, IMS Nanofabrication, Proc. SPIE 8323,83230G [February 2012]
  Download
  
  

• eBeam Initiative BACUS event presentations by AMTC, D2S and GLOBALFOUNDRIES, including Best Poster presentation by Dr. Gek Soon Chua, GLOBALFOUNDRIES [September 20, 2011]
  Download PDF
  
  

• BACUS 2011 Paper - Reducing shot count through optimization-based fracture, Timothy Lin, Emile Sahouria, Nataraj Akkiraju, and Steffen Schulze. Proc. SPIE 8166, 81660T (2011) [October 13, 2011]
  Download PDF
  
  

• BACUS 2011 Poster Session - Assessment and comparison of different approaches for mask write time reduction, A. Elayat, T. Lin, E. Sahouria, and S. F. Schulze, Proc. SPIE 8166, 816634 (2011) [October 13, 2011]
  Download PDF
  
  

• BACUS 2011 Best Poster - Optimization of mask shot count using MB-MDP and lithography simulation by GLOBALFOUNDRIES and D2S [September 20, 2011]
  Download PDF
  
  

• SPIE 2011 Model-Based Mask Data Prep (MB-MDP) and its effect on heating [March 2, 2011]
  Download PDF
  
  

• IBM presentation at eBeam Initiative SPIE lunch [March 1, 2011]
  Download PDF
  
  

• NuFlare presentation at eBeam Initiative SPIE Lunch [March 1, 2011]
  Download PDF
  
  

• D2S presentation at eBeam Initiative SPIE Lunch [March 1, 2011]
  Download PDF
  
  

• SPIE 2011 E-beam Direct Write Overview [March 1, 2011]
  Download PDF
  
  

• SPIE 2011 IMAGINE: An Open Consortium to Boost Maskless Lithography Take Off - First Assessment Results on Mapper Technology [March 2011]
  Download PDF
  
  

• Model-Based Mask Data Preparation Using Overlapping Shots: Making Optical Lithography Cost-effective for 20-nm Devices [March 1, 2011]
  Download PDF
  
  

• Improvement of Mask Write Time for Curvilinear Assist Features at 22nm [September 14, 2010]
  Download PDF
  
  

• Writing 32nm-hp Contacts with Curvilinear Assist Features [September 14, 2010]
  Download PDF
  
  

• Impact of Model-Based Fracturing on E-beam Proximity Effect Correction Methodology [September 14, 2010]
  Download PDF
  
  

• Design for e-beam: design insights for direct-write maskless lithography [September 15, 2010]
  Download PDF
  
  

• Best paper award at PMJ 2010 - Best depth of focus on 22nm logic wafers with less shot count; Aki Fujimura - D2S, Tadashi Komagata and Yasutoshi Nakagawa - JEOL, David Kim, Vikram Tolani and Tom Cecil - Luminescent Technologies; Photomask Japan 2010
  Download PDF
  
  

• Efficiently writing circular contacts on production reticle; Aki Fujimura - D2S, Christophe Pierrat - IC Images Technologies, Taiichi Kiuchi, Tadashi Komagata and Yasutoshi Nakagawa - JEOL; Photomask Japan 2010
  Download PDF
  
  

• Writing "wavy" metal 1 shapes on 22 nm Logic Wafers with Less Shot Count Harold R. Zable and Aki Fujimura - D2S, Tadashi Komagata and Yasutoshi Nakagawa - JEOL, John S. Petersen - Petersen Advanced Lithography; Photomask Japan 2010
  Download PDF
  
  

• ISQED Keynote now available - Design for E-Beam: Getting the Best Wafers Without the Exploding Mask Costs by Aki Fujimura, March 24, 2010
  Download PDF
  
  

• Circles: One Key to Successful Lithography at Advanced Nodes by Aki Fujimura, February 23, 2010
  Download PDF
  
  

• DFEB Methodology Guidelines for Physical Design Engineers now available
  Download PDF
  
  

• ICCAD Tutorial now available - Beyond Light: The Growing Importance of E-Beam by Aki Fujimura, Nov. 2, 2009
  Download PDF
  
  

• eBeam members presentation at EIPBN - May 29, 2009
  Download PDF
  
  

• eBeam members presentation at MUSIC - April 2, 2009
  Download PDF
  
  

• DFEB Technology Backgrounder
  Download PDF
  
  

• Initiative Overview
  Download PDF
  
  

• Fujitsu Viewpoint at Initiative Launch
  Download PDF
  
  

• eSilicon Perspective on DFEB
  Download PDF