Presentation: Full-Reticle Curvilinear Inline Linearity Correction Including Variable Bias with Zero Turnaround Time by Paris Spinelli, Micron, at PMJ 2025 [April 18, 2025]
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Presentation: Three Ways to Improve Wafer Uniformity by Aki Fujimura, D2S at PMJ 2025 [April 18, 2025]
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Videos: Spring 2025 Fine Line Video Journal [March 26, 2025]
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Presentation: PLDC Improves Uniformity and Linearity for All Masks by Aki Fujimura, D2S [February 25, 2025]
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Event: Save the Date for the PMJ 2025 Finale hosted by the eBeam Initiative. Friday, April 18 right after the final session in the PMJ program and in the same room, the Annex Hall, Pacifico Yokohama.
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Press: eBeam Initiative Member Companies to Take Center Stage at SPIE Advanced Lithography and Patterning Conference [February 18, 2025]
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Survey: 2025 Deep Learning Applications List by eBeam Initiative members [February 18, 2025]
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Event:
eBeam Initiative SPIE-AL Annual Lunch and Members Meeting, Tuesday, February 25, 2025
Videos: Autumn 2024 Fine Line Video Journal [October 28, 2024]
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Survey: 2024 eBeam Initiative Luminaries Survey Results [October 1, 2024]
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Mission | The Initiative provides a forum for educational and promotional activities regarding a new design-to-manufacturing approach, known as Design for e-beam (DFEB), that reduces mask costs for semiconductor devices.
Technology | DFEB is a design and software approach to enhance the throughput of e-beam lithographic exposure. DFEB uses character projection (CP) technology combined with design and software techniques to reduce a design's required shot count, resulting in increased CP e-beam direct-write (EbDW) throughput.
Applications | Systems companies seeking all-layer custom SoC prototypes; low-to-mid-volume semiconductor companies producing maskless test chips, engineering samples, and derivative chips; and supercomputing applications.
Design Team Advisors | Provide business and technical insights and requirements to the Steering Group and Ecosystem members.
Marty Deneroff, D. E. Shaw Research
Jack Harding, eSilicon Corporation
Colin Harris, PMC-Sierra
Riko Radojcic, Qualcomm
Jean-Pierre Geronimi, STMicroelectronics
Photomask Japan: Photomask Japan: eBeam Initiative Members Named in Best Paper and Best Poster Awards at PMJ 2025 [May 20, 2025]
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Semiconductor Digest: Curvilinear Technology: A Game Changer for the Logic Technology Roadmap by Ryoung-Han Kim, imec [May 13, 2025]
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Semiconductor Engineering: Three Ways Curvy ILT Together With PLDC Improves Wafer Uniformity [April 15, 2025]
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Semiconductor Engineering: Reflecting on the SPIE Advanced Lithography + Patterning Symposium 2025 by Dr. Harry Levinson [March 20, 2025]
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Semiconductor Engineering: EUV’s Future Looks Even Brighter [February 20, 2025]
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Semiconductor Engineering: Improving Uniformity and Linearity for All Masks by Aki Fujimura, D2S [January 29, 2025]
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Semiconductor Digest: 2025: The Future is Bright for the Photomask Industry [January 3, 2025]
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